Capacitively Coupled Plasmas I

Presentations

• Operation characteristics of high-Voltage, low-pressure CCPs targeting etching applications

  COFFEE_KLATCH · Invited

  Oct. 6, 2020, 11:00 AM – Oct. 6, 2020, 11:30 AM

  Authors

  • Peter Hartmann

    Wigner Research Center, Hungary, Wigner Research Centre for Physics

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• Nonlinear standing wave effect and plasma uniformity in very-high-frequency capacitively coupled plasmas

  COFFEE_KLATCH · Invited

  Oct. 6, 2020, 11:30 AM – Oct. 6, 2020, 12:00 PM

  Authors

  • Yong-Xin Liu

    Dalian University of Technology

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• The effect of gas pressure on the nonlinear harmonic excitation in very high frequency asymmetric capacitive discharges

  ORAL

  Oct. 6, 2020, 12:00 PM – Oct. 6, 2020, 12:15 PM

  Authors

  • Jian-Kai Liu

    Dalian University of Technology; University of California, Berkeley

  • Emi Kawamura

    University of California, Berkeley

  • Michael Lieberman

    University of California, Berkeley

  • Allan Lichtenberg

    University of California, Berkeley

  • You-Nian Wang

    Dalian University of Technology

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• Experimental verification of 1d3v PIC/MCC simulations of capacitive RF plasmas operated in argon

  ORAL

  Oct. 6, 2020, 12:15 PM – Oct. 6, 2020, 12:30 PM

  Authors

  • David A. Schulenberg

    Ruhr-University Bochum

  • Ihor Korolov

    Ruhr-University Bochum

  • Zoltan Donko

    Wigner Research Centre for Physics, Budapest

  • Aranka Derzsi

    Wigner Research Centre for Physics, Budapest

  • Julian Schulze

    Ruhr-University Bochum; Dalian University of Technology, Ruhr-University Bochum, Germany, Ruhr Univ Bochum

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• The difference between electron heating and power absorption in capacitively coupled plasmas

  ORAL

  Oct. 6, 2020, 12:30 PM – Oct. 6, 2020, 12:45 PM

  Authors

  • Sebastian Wilczek

    Ruhr University Bochum

  • Julian Schulze

    Ruhr University Bochum, Ruhr-University Bochum, Dalian University of Technology, Ruhr-University Bochum, Ruhr University, Bochum, Germany

  • Ralf Peter Brinkmann

    Ruhr University Bochum, Ruhr University, Bochum, Germany, Ruhr-University Bochum

  • Zoltán Donkó

    Wigner Research Centre for Physics

  • Jan Trischmann

    Brandenburg University of Technology Cottbus-Senftenberg

  • Thomas Mussenbrock

    Brandenburg University of Technology Cottbus-Senftenberg

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• Electrical Asymmetry Effect in Very High Frequency Capacitively Coupled Plasmas

  ORAL

  Oct. 6, 2020, 12:45 PM – Oct. 6, 2020, 1:00 PM

  Authors

  • Xiaopu Li

    Applied Materials, Inc., Applied Materials Inc

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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• Effects of Focus Ring in Capacitively Coupled Plasma Based on 1D Circuit Modeling and Experiments

  ORAL

  Oct. 6, 2020, 1:00 PM – Oct. 6, 2020, 1:15 PM

  Authors

  • Yuhua Xiao

    North Carolina State University

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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• High-Energy Ballistic Electrons in Low-Pressure Radio-Frequency Plasmas.

  ORAL

  Oct. 6, 2020, 1:15 PM – Oct. 6, 2020, 1:30 PM

  Authors

  • Yangyang Fu

    Michigan State Univ, Michigan State University

  • Bocong Zheng

    Michigan State University

  • De-Qi Wen

    Michigan State Univ, Michigan State Unversity, Michigan State University

  • Peng Zhang

    ECE, Michigan State University, 48824, USA, Michigan State University, ECE, Michigan State University

  • Qi Hua Fan

    Michigan State University

  • Clarisse Bourdelle

    Nagoya University, University of Michigan - Ann Arbor, Los Alamos National Laboratory, Graduate School of Engineering, Tohoku University, Lynntech, Inc., , Research Center for Production & Technology, Nisshin Seifun Group Inc., Fujimino, Japan, kanazawa University, National Taiwan University of Science and Technology, Institute of Experimental and Applied Physics, Kiel University, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary, Sandia National Laboratories, University of Minnesota, Kyushu University, Princeton plasma physics laboratory, North Carolina State University, Karamedica, Inc., CSIR-Central Electronics Engineering Research Institute, Center for Low-temperature Plasma Science, Nagoya University, Laboratoire de Physique des Plasmas, Ecole Polytechnique-CNRS-Sorbonne Université 91128, Palaiseau, France, University of Michigan, Samsung Electronics Mechatronics Division, Aix-Marseille University, DIFFER, Ruhr-University Bochum, University of Seville, LSPM-CNRS, University of York, The University of Shiga Prefecture, university of toronto, Lawrence Livermore National Laboratory, University of Illinois at Urbana-Champaign, Tokyo Metropolitan Univ, CSIR-Central Electronics Engineering Research Institute, Pilani, Rajasthan-333031, Department of Physics, University of Louisiana at Lafayette, Synchrotron SOLEIL, Saint-Aubain, France, Universite Paris Saclay, CNRS, Laboratoire de Physique des Gaz et des Plasmas, 91405 Orsay, France, Universite Sorbonne Paris Nord, Laboratoire des Sciences des Procedes et des Materiaux, LSPM, CNRS, UPR 3407, F-93430, Villetaneuse, France, Michigan State University, Retired, Tu/e, The Netherlands, LPP, France, LPICM, France, Masaryk University, Czech Republic, Brandenburg University of Technology Cottbus-Senftenberg, Ruhr-University Bochum, Dalian University of Technology, Lomonosov Moscow State University, Moscow, Russia, Pacific National University, Khabarovsk, Russia, Missouri Univ of Sci & Tech, UAE University, Tbilisi State University, ELI Beamlines, Prague, Northwest Missouri State University, University of Science and Technology of China, University of Saskatchewan, Institute of Plasma Physics Chinese Academy of Science, Meijo University, Department of Engineering , Shizuoka University, Department of Mechanical Engineering , Shizuoka University, Nagoya Univ, Meijo Univ, Nagoya university, cLPS Nagoya university, NIFS, Nagoya university, cLPS Nagoya university, Nagoya university, Valdosta State University, Centauri, LLC, BB Intuitive Tutoring Company, Huazhong Univ, East China Univ of Tech, Northwest Normal Univ, Dublin City University, Ruhr Univ Bochum, Department of Engineering, Shizuoka University, Department of Mechanical Engineering, Shizuoka University, Texas A&M University Department of Mechanical Engineering, Ruhr-University Bochum, Germany, Dalian University of Technology, China, Brandenburg University of Technology, Cottbus, Germany, Wigner Research Centre for Physics, Budapest, Hungary, Ruhr-University Bochum, Germany, George Washington University, Ruhr University Bochum, Wigner Research Centre for Physics, West Virginia University, Ruhr-University Bochum, Dalian University of Technology, Wigner Research Centre for Physics, Brandenburg University of Technology, Samsung Electronics Co., University of Pannonia, Institute of Plasma Physics, ASCR, Czechia, University of Alabama in Huntsville, University of South Carolina, DIFFER, Eindhoven, the Netherlands, University of Antwerp, Belgium, Instituto Superior Técnico, Lisbon, PortugalIn, Ruhr University Bochum, Germany, Ecole Polytechnique, France, University of York, U.K., Hokkaido University, Oak Ridge National Laboratory, Idaho National Laboratory, University of Illinois - Urbana, Univ. Grenoble Alpes, CNRS, Grenoble INP*, G2Elab, Grenoble, 38031, France, IBM, Texas A\&M University, LTE Oil, CMAP, LPP, VKI, LPP/CMAP, Laboratoire EM2C, CentraleSupelec, CNRS, Universite Paris-Saclay, CU, New York, NY, USA, UCLouvain, Belgium, MPIK; CU, New York, NY, USA, MPIK; University of Greifswald, Germany, Max-Planck-Institut f\"ur Kernphysik (MPIK), Heidelberg, Germany, Yokohama National University, Tohoku University, Swiss Federal Lab for Mat Sci and Tech, Nagoya Univ., cLPS Nagoya Univ., NIFS, Nagoya Univ., Syntek Technologies, U.S. Naval Research Laboratory, Texas A&M University, LTEOIL LLC, Hanyang Univ, Department of Electrical Engineering, Pusan National University, University of Shiga Prefecture, University of Tokyo, Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Tokyo Metropolitan University, Nihon University, Department of Nuclear Engineering, Seoul National University, Seoul, 08826, Agency of Defense Development, Daejeon, 34186, Department of Nuclear and Quantum Engineering, KAIST, Daejion, 34141, Department of Engineering Physics, Tsinghua University, Beijing, China 100084, CNR-Istituto di Struttura della Materia, CP10,00015 Monterotondo Scalo, Italy, Université de Lorraine, CNRS, LPCT, F-57000 Metz, France, Embry-Riddle Aeronautical University, Phys. Sciences Dept. Daytona Beach, FL, USA, University of California San Diego, U. of Tokyo, U. of Greifswald, TU M\"unchen, Lawrence U., Max Planck IPP, Curtin University, Faculty of Mathematics and Physics, Charles University, FIZ Karlsruhe - Leibniz Institute for Information Infrastructure, Leibniz Institute for Plasma Science and Technology (INP), Univ of North Texas, Fujitsu Client Computing Limited, Vytautas Magnus Univ, Kyushu Univ, Institute of Plasma Physics of the CAS, Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague 8, Czech Republic, Masaryk University, Department of Physical Electronics, Kotlarska 2, 6110 37 Brno, Czech Republic, Applied Materials, Inc., CERFACS, Laboratoire de Physique de Plasmas, CNR, Stanford University, Masaryk University, Czechia, CNRS Institut Pprime, Universite de Poitiers, Ruhr-University Bochum, Germany; Dalian University of Technology, China, MPIK, Heidelberg, Germany, Columbia University, NY, NY, USA, MPIK, Heidelberg, Germany, Universitaet Greifswald, Germany, National Fusion Research Institute, Korea Research Institute of Chemical Technology, Jeju National University, Nisshin Seifun Group Inc., Kanazawa University, Tech-X Corporation, University of Maryland, Samsung Mechatronics Research Group, Applied Materials Inc, Tokyo City University, Tokyo City University Graduate School, Princeton Plasma Physics Laboratory, University of Applied Science, Soest, Germany, ThrustMe, ECE, Michigan State University, DIFFER - Dutch Institute for Fundamental Energy Research, The University of Kent, Canterbury, CT2 7NH, UK, V. P. Science College, Vallabh Vidyanagar, India, H. V. H. P. institute of Science, Kadi, India, M.N. Science College, Patan, India, UCLA, Tokyo Electron Ltd., Tokyo Electron Miyagi Ltd., Tokyo Electron America, DIFFER, Eindhoven, The Netherlands, SPC/EPFL, Lausanne, Switzerland, CNRS, Aix-Marseille Univ., Marseille, France, CEA, IRFM, Saint Paul Lez Durance, France

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