Perspectives on Plasma Science
INVITED · NR3
Presentations
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Overview of linear plasma sources as applied to ribbon ion and plasma beam processing of scanned substrates
COFFEE_KLATCH · Invited
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Authors
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Peter Kurunczi
Applied Materials Inc
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Low-temperature plasma science and collision physics studies at the National Science Foundation
Invited
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Authors
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Vyacheslav (Slava) Lukin
U.S. Department of Energy, NSF
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Overview of DOE/FES Program Activities for Low Temperature Plasma Science Research
Invited
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Authors
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Vyacheslav (Slava) Lukin
U.S. Department of Energy, NSF
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