APS Logo

Poster Session II

POSTER · MW1





Presentations

  • Target Dependence of Post-Collision Effects in Ionization by Proton Impact.

    POSTER

    Authors

    • Madhav Dhital

      Missouri University of Science and Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Michael Schulz

      Missouri University of Science and Technology

    View abstract →

  • The effect of temperature on electron recombination with water and hydrocarbon ions in high-voltage nanosecond discharge afterglow

    POSTER

    Authors

    • Andrey Starikovskiy

      Princeton University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Comparisons of electron transport and rate coefficients in CO2 and Ar/CO2 calculated from cross-section datasets available on LXCat

    POSTER

    Authors

    • L.C. Pitchford

      Laplace, CNRS & Univ. Toulouse III, France

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Dust particle string formation in the PK-4 direct current neon discharge

    POSTER

    Authors

    • Peter Hartmann

      Wigner Research Centre for Physics, Budapest, Hungary, CASPER, Baylor University, One Bear Place 97316, Waco, TX

    • Lorin S. Matthews

      Baylor University - CASPER, Baylor University, CASPER, Baylor University, One Bear Place 97316, Waco, TX

    • Evdokiya Kostadinova

      CASPER, Baylor University, One Bear Place 97316, Waco, TX

    • Truell W. Hyde

      Baylor University - CASPER, CASPER, Baylor University, One Bear Place 97316, Waco, TX

    • Marlene Rosenberg

      University of California, San Diego, California, Department of Electrical and Computer Engineering, University of California San Diego, La Jolla, California 92093, USA

    View abstract →

  • Synthesis of core-shell nanoparticles with tin-droplet core using magnetron sputtering dusty plasma

    POSTER

    Authors

    • K. Sasaki

      Hokkaido University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Emission model for determining EEDF in low-pressure oxygen plasmas

    POSTER

    Authors

    • Jessica Pachicano

      University of Wisconsin - Madison

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • A new diagnostic method for measurement of local plasma density

    POSTER

    Authors

    • Min Sup Hur

      Ulsan National Institute of Science and Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Development of a Sensitive Electric Field Probe in Ar plasmas using Optically Trapped Fine Particles

    POSTER

    Authors

    • Kentaro Tomita

      Interdisciplinary Graduate School of Engineering Science, Kyushu University,

    • Sakyo Okunaga

      Graduate School of Information Science and Electrical Engineering, Kyushu University

    • Kunihiro Kamataki

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University

    • Naho Itagaki

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University

    • Kazunori Koga

      Kyushu University, National Institutes of Natural Science, Graduate School of Information Science and Electrical Engineering, Kyushu University, Kyushu University and National Institutes of Natural Sciences, Kyushu university

    • Masaharu Shiratani

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University, Kyushu university

    View abstract →

  • In situ Raman spectroscopy of silicon surfaces in contact with atmospheric-pressure pressure plasmas

    POSTER

    Authors

    • David Pai

      CNRS Institut Pprime, University of Poitiers

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • A spectral-kinetic approach for the planar multipole resonance probe

    POSTER

    Authors

    • Michael Friedrichs

      Institute of Product and Process Innovation, Leuphana University of Lüneburg, Leuphana Universitity Lüneburg

    • Junbo Gong

      Institute of Theoretical Electrical Engineering, Ruhr University Bochum

    • Ralf Peter Brinkmann

      Institute of Theoretical Electrical Engineering, Ruhr University Bochum

    • Jens Oberrath

      Institue of Product and Process Innovation, Leuphana University Lueneburg, Institute of Product and Process Innovation, Leuphana University of Lüneburg, Leuphana Universitity Lüneburg

    View abstract →

  • Quantifying Plasma transport in ROBIN negative ion source: PIC-MCC Simulations vs. Experiments

    POSTER

    Authors

    • Bhaskar Chaudhury

      DA-IICT, Gandhinagar, India, 382007, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Mainak Bandyopadhyay

      ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Kinetic Investigation of the Planar Multipole Resonance Probe

    POSTER

    Authors

    • Chunjie Wang

      Ruhr University Bochum

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Multi-physics simulation of a capacitively coupled plasma reactor with a non-flat electrode

    POSTER

    Authors

    • Seung-Min Ryu

      The university of texas at austin, Samsung Electronics Co., Ltd.

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • 2D axial-azimuthal Particle-In-Cell benchmark for low-temperature magnetized plasmas

    POSTER

    Authors

    • Thomas Charoy

      Laboratoire de Physique des Plasmas, Laboratoire de Physique des Plasmas (LPP), CNRS, Ecole polytechnique, Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique

    • Jean-Pierre Boeuf

      LAPLACE

    • Anne Bourdon

      LPP, CNRS, Ecole Polytechnique, Laboratoire de Physique des Plasmas, Laboratoire de Physique des Plasmas (LPP), CNRS, Ecole polytechnique, Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique, LPP

    • Pascal Chabert

      Laboratoire de Physique des Plasmas, École Polytechnique, LPP, CNRS, Ecole Polytechnique, Laboratoire de Physique des Plasmas (LPP), CNRS, Ecole polytechnique, Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique, LPP

    • Denis Eremin

      Ruhr-Universität

    • Laurent Garrigues

      LAPLACE

    • Kentaro Hara

      Texas A\&M University, Department of Aerospace Engineering, Texas A\&M University, Texas A&M University

    • Tasman Powis

      Princeton University

    • Andrei Smolyakov

      University of Saskatchewan

    • Dmytro Sydorenko

      University of Saskatchewan

    • Antoine Tavant

      Laboratoire de Physique des Plasmas, LPP, CNRS, Ecole Polytechnique and SAFRAN Aircraft Engines, Laboratoire de Physique des Plasmas, CNRS, Ecole polytechnique, LPP

    • Willca Villafana

      CERFACS

    View abstract →

  • The simulation of a three-dimensional fluid model for H2 inductively coupled plasma at low pressure

    POSTER

    Authors

    • Ying-Jie Wang

      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    • Fei Gao

      School of Physics, Dalian University of Technology, Dalian 116024, China, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    • You-Nian Wang

      Dalian University of Technology, School of Physics, Dalian University of Technology, Dalian 116024, China, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    View abstract →

  • Fluid simulations of discharge mode transition in inductively coupled Ar/O2 plasmas with an RF bias

    POSTER

    Authors

    • Jia-Wei Huang

      School of Physics, Dalian University of Technology, Dalian 116024, China

    • Hong Li

      School of Physics, Dalian University of Technology, Dalian 116024, China

    • Yu-Ru Zhang

      Dalian University of Technology, School of Physics, Dalian University of Technology, Dalian 116024, China

    • Fei Gao

      School of Physics, Dalian University of Technology, Dalian 116024, China, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    • You-Nian Wang

      Dalian University of Technology, School of Physics, Dalian University of Technology, Dalian 116024, China, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    View abstract →

  • A hybrid simulation of radio frequency biased inductively coupled Cl2 discharges

    POSTER

    Authors

    • Lei Tong

      Dalian University of Technology

    • Yu-Ru Zhang

      Dalian University of Technology, School of Physics, Dalian University of Technology, Dalian 116024, China

    • Yuan-Hong Song

      Dalian University of Technology

    • You-Nian Wang

      Dalian University of Technology, School of Physics, Dalian University of Technology, Dalian 116024, China, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education),School of Physics, Dalian University of Technology

    View abstract →

  • Spectroscopic diagnostics of microwave excited atmospheric pressure Ar plasma jet in open air

    POSTER

    Authors

    • Keigo Takeda

      Meijo University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Impact of N$_2$O and O$_2$ admixtures on pulsed DBDs in N$_2$ at atmospheric pressure

    POSTER

    Authors

    • M. M. Becker

      Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Leibniz Institute for Plasma Science and Technology (INP), Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Modeling of streamer interaction with dense and rarefied flat gaseous layers

    POSTER

    Authors

    • Andrey Starikovskiy

      Princeton University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Influence of surface parameters on DBDs in argon at subatmospheric pressure

    POSTER

    Authors

    • M. Stankov

      Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

    • M. M. Becker

      Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Leibniz Institute for Plasma Science and Technology (INP), Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany

    • R. Bansemer

      Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

    • Detlef Loffhagen

      Leibniz Institute for Plasma Science and Technology, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

    View abstract →

  • Parametric study of TiN deposition with field-emitting surface dielectric barrier discharge

    POSTER

    Authors

    • Moriyuki Kanno

      The University of Tokyo

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Behavior of Atomic Nitrogen in Medium Pressure Short-gapped Discharge

    POSTER

    Authors

    • Yusuke Nakagawa

      Tokyo Metropolitan University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • The Pulsed Negative Corona in Nitrogen with Different Needle-Plane Electrodes

    POSTER

    Authors

    • Xing Zhang

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    • Yulin Guo

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    • Anbang Sun

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    • Guanjun Zhang

      State Key Laboratory of Electrical Insulation and Power Equipment, School of Electrical Engineering, Xi’an Jiaotong University

    View abstract →

  • High-pressure plasma source development through time-resolved diagnostics, PIC and global simulations

    POSTER

    Authors

    • Gunsu Yun

      Pohang University of Science and Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Frequency variation in micro atmospheric pressure plasma jets driven by tailored voltage waveforms

    POSTER

    Authors

    • Lena Bischoff

      Ruhr University Bochum, Germany

    • Gerrit Huebner

      Ruhr University Bochum, Germany

    • Ihor Korolov

      Ruhr University Bochum, Germany

    • Zoltan Donko

      Hungarian Academy of Sciences, Budapest, Hungary

    • Yue Liu

      Brandenburg University of Technology, Brandenburg University of Technology, Cottbus, Germany

    • Thomas Mussenbrock

      Brandenburg University of Technology, Cottbus, Germany

    • Julian Schulze

      Ruhr-University Bochum, Ruhr-University Bochum, Germany, 2Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany, Ruhr University Bochum, Germany, West Virginia University, USA, West Virginia University, Ruhr University Bochum, Ruhr University Bochum, Germany

    View abstract →

  • Space-resolved oxygen radical measurement of atmospheric pressure microwave line plasma using vacuum ultraviolet absorption spectroscopy

    POSTER

    Authors

    • Hansin Bae

      Nagoya University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Microscopic observation of an atmospheric-pressure microwave plasma produced in a meter-scale slot with sub-millimeter gap

    POSTER

    Authors

    • Hirotaka Toyoda

      Nagoya University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Energy transport in atmospheric-pressure plasmas driven by pulsed microwave

    POSTER

    Authors

    • Woojin Nam

      Pohang University of Science and Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Gunsu Yun

      Pohang University of Science and Technology

    View abstract →

  • On the Similarities of High Pressure Microdischarges

    POSTER

    Authors

    • Yangyang Fu

      Michigan State Univ

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Analysis of Temperature Distribution Affected by Convection to Ring Electrode in Double-Flow Type Gas Circuit Breaker

    POSTER

    Authors

    • Yuji Komai

      Tokyo City University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Numerical Analysis of Pulsed TIG Arc Welding under Consideration of Thermal and Chemical Non-Equilibrium

    POSTER

    Authors

    • Yusuke Nemoto

      Tokyo City University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Flow field characteristics of low-power arc-heated plasma jets

    POSTER

    Authors

    • Xian Meng

      Institute of Mechanics, Chinese Academy of Sciences

    • Xian Meng

      Institute of Mechanics, Chinese Academy of Sciences

    • Xian Meng

      Institute of Mechanics, Chinese Academy of Sciences

    • Xian Meng

      Institute of Mechanics, Chinese Academy of Sciences

    • Xian Meng

      Institute of Mechanics, Chinese Academy of Sciences

    View abstract →

  • Arc Deflection Length Affected by Frequency of Pulsed TIG Arc Welding with Lateral Gas

    POSTER

    Authors

    • Takuya Tashiro

      Tokyo City University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Simulation of electron interactions with liquid water and processes related to sub-nanosecond electrical breakdown

    POSTER

    Authors

    • Tomas Hoder

      Masaryk University, Brno, Czech Republic

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Fast optical and electrical measurements at a single microdischarge setup during plasma electrolytic oxidation (PEO)

    POSTER

    Authors

    • Anna Lena Schoene

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Vera Bracht

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Patrick Hermanns

      Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    • Peter Awakowicz

      Ruhr-University Bochum, Institute of Electrical Engineering and Plasma Technology, Ruhr University Bochum

    View abstract →

  • Dense plasma in supercritical argon fluid with long-lived clusters

    POSTER

    Authors

    • Seungtaek Lee

      Pohang University of Science and Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Gunsu Yun

      Pohang University of Science and Technology

    View abstract →

  • Influence of gas temperature and gas species on the characteristics of low-temperature plasma

    POSTER

    Authors

    • Shohei Moriya

      FIRST, Tokyo Institute of Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Akitoshi Okino

      FIRST, Tokyo Institute of Technology

    View abstract →

  • A novel approach for depyrogenation using a dielectric barrier discharge plasma system.

    POSTER

    Authors

    • Naman Bhatt

      North Carolina State University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • DBD Jet Delivery for Rapid CRISPR/Cas9 Editing in Plants

    POSTER

    Authors

    • Matthew Burnette

      Texas A&M University

    • Min Huang

      Texas A\&M University, Texas A&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • David Staack

      Texas A&M University, Texas A\&M University, Texas A&M University Department of Mechanical Engineering, Department of Mechanical Engineering, Texas A\&M University, College Station

    View abstract →

  • Effect of direct irradiation of room-temperature helium plasma jet to fission yeast cells

    POSTER

    Authors

    • Shinji Yoshimura

      National Institute for Fusion Science

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Hydroxyl radical densities in plasma treated liquid

    POSTER

    Authors

    • Brayden Myers

      North Carolina State University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Effect of RF plasma on the growth of titanium carbide thin films using pulsed laser deposition.

    POSTER

    Authors

    • Heman Bhuyan

      Institute of Physics, Pontificia Universidad Católica de Chile

    • Miguel Escalona

      Institute of Physics, Pontificia Universidad Católica de Chile

    • Julian Schulze

      Ruhr-University Bochum, Ruhr-University Bochum, Germany, 2Department of Electrical Engineering, Ruhr University Bochum, Bochum, Germany, Ruhr University Bochum, Germany, West Virginia University, USA, West Virginia University, Ruhr University Bochum, Ruhr University Bochum, Germany

    • Partha Saikia

      Plasma Technology Research Centre, Physics Department, University of Malaya

    • Mario Favre

      Institute of Physics, Pontificia Universidad Católica de Chile

    • Felipe Veloso

      Institute of Physics, Pontificia Universidad Católica de Chile

    • Edmundo Wyndham

      Institute of Physics, Pontificia Universidad Católica de Chile

    • Julio Valenzuela

      Institute of Physics, Pontificia Universidad Católica de Chile

    View abstract →

  • Effects of Discharge Power on Deposition Cutoff of Carbon Nanoparticles Synthesized by High Pressure Ar$+$CH$_{\mathrm{4}}$ Multi-hollow Discharge Plasma CVD

    POSTER

    Authors

    • SungHwa Hwang

      Kyushu University

    • Kunihiro Kamataki

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University

    • Naho Itagaki

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University

    • Kazunori Koga

      Kyushu University, National Institutes of Natural Science, Graduate School of Information Science and Electrical Engineering, Kyushu University, Kyushu University and National Institutes of Natural Sciences, Kyushu university

    • Masaharu Shiratani

      Kyushu University, Graduate School of Information Science and Electrical Engineering, Kyushu University, Kyushu university

    View abstract →

  • Plasma-assisted inkjet printing of poly(3,4-ethylenedioxythiophene) from 3,4-ethylenedioxythiophene stock solution

    POSTER

    Authors

    • Kaishu Nitta

      The University of Tokyo

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Plasma discharge drilling for deep subsurface access to Mars' polar layered deposits

    POSTER

    Authors

    • Xin Tang

      Texas A&M University, Texas A\&M University

    • Jacob Mallams

      Texas A&M University, Texas A\&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • David Staack

      Texas A&M University, Texas A\&M University, Texas A&M University Department of Mechanical Engineering, Department of Mechanical Engineering, Texas A\&M University, College Station

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Electrostatic enhancement of inlet particle separators for turbine engines

    POSTER

    Authors

    • Sanil John

      Lynntech Inc.

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • Measurement of supersonic plasma flow using Mach probe under grid bias

    POSTER

    Authors

    • Insun Park

      Department of Electrical Engineering, Hanyang University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • On the ignition of a pulsed CCRF discharge in argon: effect of different afterglow durations.

    POSTER

    Authors

    • XiangYu Wang

      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • YongXin Liu

      Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →

  • The Effects of Different Metal Electrodes on DBD plasmas and Resulting Gas Chemistry

    POSTER

    Authors

    • Shivam Patel

      The University of Texas at Dallas

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    • Sergey Leonov

      Naval Research Laboratory, Washington, DC 20375, Applied Materials Inc, Grad. School of Eng., Tohoku University, Graduate School of Engineering, Tohoku University, Retired, Dalian University of Technology, Michigan State University, Texas A&M University, Teagasc, Dublin City University, GREMI, University of Orleans, Polytech Orleans, University of Orleans, Kyoto Institute of Technology, Eindhoven University of Technology, VDL Enabling Technologies Group, Ruhr-University Bochum, Leuphana University Luneburg, North Carolina State University, Applied Materials Inc., Tokyo Metropolitan University, Hokkaido University, LPP and LPICM, CNRS, Ecole Polytechnique,Tu/e, The Netherlands, CWI Amsterdam and Eindhoven Univ Techn, Oak Ridge National Laboratory, Idaho National Laboratory, School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China, Princeton Plasma Physics Laboratory, Princeton University, Princeton, New Jersy 08543, USA, ITER-India, IPR, Gandhinagar, India, 382428, DA-IICT, Gandhinagar, India, 382007, Samsung Electronics Co., US Army SMDC/Army Forces Strategic Command, UAH Systems Management and Production Center, University of Alabama in Huntsville, Moscow Institute of Physics and Technology, CNRS Institut Pprime, University of Poitiers, CNRS, Ecole Polytechnique, Samsung Electronics Company, Ltd., Ruhr University Bochum, LPGP CNRS Univ. Paris-Sud Univ. Paris-Saclay, LSPM CNRS UPR 3407 UNIV. PARIS 13 SORBONNE PARIS CITE, Missouri University of Science and Technology, Tblisi State University, ELI Prague, United Arab Emirates University, Tokyo City University, Princeton Plasma Physics Laboratory, The University of Texas at Dallas, Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Department of Electrical Engineering, Hanyang University, Department of Physics & Biophysics, University of San Diego, Lynntech Inc., Honeybee Robotics, Ltd, NASA Jet Propulsion Laboratory, Texas A\&M University, The University of Tokyo, Nihon University, Kyushu University, National Institute for Basic Biology, National Institute for Fusion Science, Loma Linda University, Division of Infection Prevention and Control, Tokyo healthcare university, FIRST, Tokyo Institute of Technology, Pohang University of Science and Technology, Masaryk University, Brno, Czech Republic, Institute of Plasma Physics, CAS, Prague, Czech Republic, Michigan State Univ, Nagoya University, Nagoya Industries Promotion Corporation, Leibniz Institute for Plasma Science and Technology (INP), Meijo University, Samsung electronics, The university of texas at austin, Esgee Technologies Inc, Leuphana University Lüneburg, ITER-India, Institute for Plasma Research (IPR), Gandhinagar, India, 382428, Group in Computational Science and HPC, DAIICT, Gandhinagar, India, 382007, Ulsan National Institute of Science and Technology, University of Wisconsin - Madison, Texas Tech Univ, Lubbock, TX, Kinema Research, Colorado, SRC Triniti, Russia, CERN, RD51 Collaboration, IPFN/IST-UTL, Portugal, TRINITI, Los Alamos National Laboratory, Drexel University, Advanced Research Center for Nanolithography, University of Kentucky, Illinois Wesleyan University, Applied Materials, Inc., The University of Texas at Austin, Esgee Technologies Inc., Tokyo Electron America, Inc., Samsung Electronics Mechatronics Division, PIIM, Aix-Marseille University, France, University of York, UK, LSPM, Universit\'e Paris 13, France, Curtin University, University of Surrey, Gifu University, Chiba Institute of Technology, Dublin City University, Ireland, Teagasc, Ireland, Chevron Energy Technology Company, USA, Texas A&M University Department of Mechanical Engineering, Plasma Engineering and Non-equilibrium Processing Laboratory at Texas A\&M University, National Center for Electron Beam Research at Texas A\&M University, Sandia National Laboratories, Hanyang University, Korea Research Institute of Standards and Science, Korea Research Institute of Standards and Science, Chungnam National University, Hungarian Academy of Sciences, Hungarian Academy of Sciences, West Virginia University, Ruhr-University Bochum, West Virginia University, V.N. Karazin Kharkiv National University, Wigner Research Centre for Physics, Ruhr-University, West Virginia University; Ruhr-University, Wigner Research Centre for Physics; West Virginia University, Dalian University of Technology, China, University of Houston, USA, University of California, USA, CEA/CESTA, Tokyo Institute of Technology, Leibniz Institute for Plasma Science and Technology, Greifswald, Germany, University of Cambridge, Stanford University, Mechanical Engineering Department, Stanford University, LAPLACE Laboratory, Toulouse, France, Princeton Plasma Physics Laboratory, Princeton, New Jersey, USA, University of Saskatchewan, Saskatoon, Canada, Institute of Physics, National Academy of Sciences of Ukraine, Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, Princeton University, Metro Laser Co, IPFN/IST-UL, University of South Carolina, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, U.K., Leibniz Institute for Plasma Science and Technology (INP), 17489 Greifswald, Germany, LAPLACE, CNRS and Univ. Toulouse III, France, Stockholm University, Swansea University, Dalian Maritime University, Lawrence Livermore National Laboratory, Illinois Applied Research Institute, Univ. of Illinois Urbana-Champaign, LTEOil LLC, Department of Mechanical Engineering, Texas A\&M University, College Station, Osaka City University, qfan@egr.msu.edu, Department of Electrical Engineering and Information Science, Ruhr-University Bochum, Germany, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, PlasmaPotential—Physics Consulting and Research, Canberra, Australia, University of Notre Dame, Chungnam National University, Chungnam National University, Nanotech Optoelectronics Research Center, Samsung Electronics Co., Ltd., Laboratoire de physique des plasmas, Ecole Polytechnique, centre de mathematiques appliques, Xi'an Jiaotong University, Ferdinand Braun Institute Berlin, Texas A/&M University

    View abstract →