APS Logo

Low-temperature plasma science, engineering, technology, and applications I

ORAL · PO06 · ID: 3570925

Presentations

  • Towards digital twins for semiconductor chip fabrication

    ORAL

    –

    Presenters

    • Revathi Jambunathan

      Lawrence Berkeley National Laboratory

    Authors

    • Revathi Jambunathan

      Lawrence Berkeley National Laboratory

    • Richard L Lombardini

      St. Mary's University

    • Andrea Diaz

      St Mary's University, Texas

    • Andrew Fierro

      New Mexico Institute of Mining and Technology, University Professor

    • Tristan Jiron

      New Mexico Tech University

    • Remi Lehe

      Lawrence Berkeley National Laboratory

    • Andrew J Nonaka

      Lawrence Berkeley National Laboratory

    • Jorge Quiroga

      New Mexico Tech University

    View abstract →

  • Impact of Poisson Equation Boundary Conditions in Modeling Partially Ionized Hypersonic Flows

    ORAL

    –

    Publication: Petrusky, M., Boyd, I.D., "Characterization of Plasma Diffusion in Hypersonic Flows," In preparation.<br>Petrusky, M., Monroe, K., Boyd, I.D., "Unique Properties of Plasma Sheaths Formed by Hypersonic Flows," In preparation.

    Presenters

    • Marisa E Petrusky

      University of Colorado, Boulder

    Authors

    • Marisa E Petrusky

      University of Colorado, Boulder

    • Iain D Boyd

      University of Colorado, Boulder

    View abstract →

  • Viability of the Harmonic Balance Method for Low-Temperature Plasma Modeling

    ORAL

    –

    Publication: Planned Paper: Harmonic Balance for Modeling Low-Temperature Plasma

    Presenters

    • Demitrius Zulevic

      University of California, Merced

    Authors

    • Demitrius Zulevic

      University of California, Merced

    • Saurav Gautam

      Lam Research Corporation

    • Saravanapriyan Sriraman

      Lam Research Corporation

    • Venkattraman Ayyaswamy

      University of California, Merced

    View abstract →

  • Automated calibration of anomalous electron transport in a Hall effect thruster simulation

    ORAL

    –

    Publication: Troyetsky, D. E., Lopez Ortega, A., and Hara, K., "Gradient-based calibration of the anomalous electron scattering frequency in a Hall effect thruster simulation," Journal of Applied Physics, in review

    Presenters

    • Daniel Evan Troyetsky

      Stanford University

    Authors

    • Daniel Evan Troyetsky

      Stanford University

    • Alejandro Lopez Ortega

      NASA Jet Propulsion Laboratory

    • Kentaro Hara

      Stanford University

    View abstract →

  • 2 μm-wavelength laser pulses on tin microdroplets for nanolithography: properties of the plasma and emitted ions

    ORAL

    –

    Publication: S. J. J. de Lange, D. J. Hemminga, Y. Mostafa, R. A. Meijer, O. O. Versolato, and J. Sheil, "Modeling the hundreds-of-nanoseconds-long irradiation of tin droplets with a 2 μm-wavelength laser for future EUV lithography," Plasma Sources Sci. Technol. 33, 105003 (2024).<br>S. J. J. de Lange, J. Gonzalez, D. J. Engels, F. M. Kohlmeier, and J. Sheil, "Ion emission properties from tin plasmas generated by 2 μm-wavelength laser pulses," submitted manuscript

    Presenters

    • Stan J de Lange

    Authors

    • Stan J de Lange

    • John Sheil

      ARCNL/VU

    • Oscar Versolato

      Advanced Research Center for Nanolithography

    • Diko J Hemminga

      ARCNL

    • Yahia Mostafa

      ARCNL

    • Randy A Meijer

      ARCNL

    • Dion Engels

      Advanced Research Center for Nanolithography

    • Felix M Kohlmeier

      ARCNL

    View abstract →

  • Modeling of flowing magnetized plasma for small volume plasma system

    ORAL

    –

    Publication: Manuscript under preparation: S. Bag, A. Ganguli, V. Saxena, D. Sahu, and R. Narayanan, "Modeling of flowing magnetized plasma for small volume plasma system.".

    Presenters

    • Subhasish Bag

      Indian Institute of Technology Delhi (IIT Delhi)

    Authors

    • Subhasish Bag

      Indian Institute of Technology Delhi (IIT Delhi)

    • Ashish Ganguli

      Indian Institute of Technology Delhi (IIT Delhi)

    • Vikrant Saxena

      Indian Institute of Technology Delhi (IIT Delhi)

    • Debaprasad Sahu

      Associate Professor, Indian Institute of Technology Delhi, Indian Institute of Technology Delhi (IIT Delhi)

    • Ramesh Narayanan

      Professor, Indian Institute of Technology Delhi, Indian Institute of Technology Delhi (IIT Delhi)

    View abstract →

  • Experimental Study of Dusty Plasma with Carbon Nanoparticles in Ar/C₂H₂ DC Glow Discharge

    ORAL

    –

    Presenters

    • Almasbek U Utegenov

      Institute of Applied Sciences and IT, Almaty, Kazakhstan

    Authors

    • Almasbek U Utegenov

      Institute of Applied Sciences and IT, Almaty, Kazakhstan

    • Azamat Abrakhmanov

      Al-Farabi Kazakh National University, NNLOT, Almaty, Kazakhstan

    • Zhanserik Ongaibergenov

      1 Institute of Applied Sciences and IT, Almaty, Kazakhstan, 2Al-Farabi Kazakh National University, NNLOT, Almaty, Kazakhstan

    • Yerassyl Yerlanuly

      KBTU, IASIT, Institute of Applied Sciences and IT, Almaty, Kazakhstan

    • Sagi Orazbayev

      Al-Farabi Kazakh National University, NNLOT, Almaty, Kazakhstan

    • Tlekkabul Ramazanov

      Al-Farabi Kazakh National University, Al-Farabi Kazakh National University, NNLOT, Almaty, Kazakhstan, Institute of Applied Sciences and IT, Almaty, Kazakhstan, Kazakh Physical Society, Almaty, Kazakhstan

    View abstract →

  • Plasma Technologies for the Synthesis of Carbon Nanowalls and Advanced Applications

    ORAL

    –

    Publication: 1. Y. Yerlanuly, R. Zhumadilov, R. Nemkayeva, B. Uzakbaiuly, A.R. Beisenbayev, Z. Bakenov, T. Ramazanov, M. Gabdullin, A. Ng, V. V. Brus, A.N. Jumabekov, Physical properties of carbon nanowalls synthesized by the ICP-PECVD method vs. the growth time, Scientific Reports. 11 (2021) 19287. https://doi.org/10.1038/s41598-021-97997-8<br>2. Y. Yerlanuly, D. Christy, N. Van Nong, H. Kondo, B. Alpysbayeva, R. Nemkayeva, M. Kadyr, T. Ramazanov, M. Gabdullin, D. Batryshev, M. Hori, Synthesis of carbon nanowalls on the surface of nanoporous alumina membranes by RI-PECVD method, Applied Surface Science. 523 (2020) 146533. https://doi.org/10.1016/j.apsusc.2020.146533<br>3. D. Batryshev, Y. Yerlanuly, B. Alpysbaeva, R. Nemkaeva, T. Ramazanov, M. Gabdullin, Obtaining of carbon nanowalls in the plasma of radio-frequency discharge, Applied Surface Science. 503 (2020) 144119. https://doi.org/10.1016/j.apsusc.2019.144119. <br>4. Y. Yerlanuly, D. Christy, N. Van Nong, H. Kondo, B.Y. Alpysbayeva, R. Zhumadilov, R.R. Nemkayeva, T.S. Ramazanov, M. Hori, M.T. Gabdullin, Creation of unique shapes by coordination of alumina nanopores and carbon nanowalls, Fullerenes, Nanotubes and Carbon Nanostructures. 31 (2023) 295–301. https://doi.org/10.1080/1536383X.2022.2146672<br>5. Y. Yerlanuly, H.P. Parkhomenko, R.Y. Zhumadilov, R.R. Nemkayeva, G. Akhtanova, M.M. Solovan, A.I. Mostovyi, S.A. Orazbayev, A.U. Utegenov, T.S. Ramazanov, M.T. Gabdullin, A.N. Jumabekov, V. V. Brus, Achieving stable photodiode characteristics under ionizing radiation with a self-adaptive nanostructured heterojunction CNWs/CdZnTe, Carbon. 215 (2023) 118488. https://doi.org/10.1016/j.carbon.2023.118488<br>6. R.Y. Zhumadilov, Y. Yerlanuly, H. Kondo, R.R. Nemkayeva, T.S. Ramazanov, M. Hori, M.T. Gabdullin, Hydrogen peroxide sensing with nitrogen-doped carbon nanowalls, Sensing and Bio-Sensing Research. 43 (2024) 100614. https://doi.org/10.1016/j.sbsr.2023.100614<br>7. R.Y. Zhumadilov, Y. Yerlanuly, H.P. Parkhomenko, B. Soltabayev, S.A. Orazbayev, Z. Bakenov, T.S. Ramazanov, M.T. Gabdullin, A.N. Jumabekov, Carbon nanowall-based gas sensors for carbon dioxide gas detection, Nanotechnology. 35 (2024) 165501. https://doi.org/10.1088/1361-6528/ad1a7e<br>8. Y. Yerlanuly, R.Y. Zhumadilov, I. V. Danko, D.M. Janseitov, R.R. Nemkayeva, A. V. Kireyev, A.B. Arystan, G. Akhtanova, J. Vollbrecht, N. Schopp, A. Nurmukhanbetova, T.S. Ramazanov, A.N. Jumabekov, P.A. Oreshkin, T.K. Zholdybayev, M.T. Gabdullin, V. V. Brus, Effect of Electron and Proton Irradiation on Structural and Electronic Properties of Carbon Nanowalls, ACS Omega. 7 (2022) 48467–48475. https://doi.org/10.1021/acsomega.2c06735

    Presenters

    • Yerassyl Yerlanuly

      KBTU, IASIT, Institute of Applied Sciences and IT, Almaty, Kazakhstan

    Authors

    • Yerassyl Yerlanuly

      KBTU, IASIT, Institute of Applied Sciences and IT, Almaty, Kazakhstan

    • Maratbek Gabdullin

      KBTU, 3Kazakh Physical Society, Almaty, Kazakhstan 4Kazakh-British Technical University, Almaty, Kazakhstan

    View abstract →

  • Exploring Plasma Behavior in Dielectric Barrier Discharges with Non-Equal Electrode Spacing

    ORAL

    –

    Publication: [1] Z. Li, et al. Plasma Sources Sci. Technol. 30, 065026 (2021)<br>[2] S. Jin, et al. High Voltage, 1-9 (2021)<br>[3] S. Jin, et al. Plasma Processes Polymers e2200021 (2022)<br>[4] J. Liu, et al. J. Phys. D: Appl. Phys. 57, 275201 (2024)<br>[5] S. Jin, et al. IEEE Trans. Plasma Sci. 51, 60-65 (2023)

    Presenters

    • XinPei Lu

      Huazhong University of Science & Technology

    Authors

    • XinPei Lu

      Huazhong University of Science & Technology

    View abstract →