Modeling Dielectric Barrier Discharge via Simulink to Determine Local Kinetic Rates

Body: Incremental improvements of material parameters continue to serve as a major avenue of technological development in the modern world. Rapid prototyping of established, new, and future moieties is the backbone upon which these material improvements are made. Among a bevy of surface modification methods, Dielectric Barrier Discharge shows great promise. In this study, Matlab and Simulink are used to create an equivalent circuit model for a parallel plate DBD chamber, detailing the electrical characteristics of the discharge. The results accurately model those of a DBD discharge and will be fit to estimate the parameters of a real system. Specifically, use of the generated Lissajous figures will be used to determine additional electrical, as well as power and energy parameters. The approximation elucidates physical values governing certain regions of the reactor, which assists in determining kinetic rates between gases used in surface modifications of substrates within a reactor system.