Development of a capacitively coupled and inductively coupled dual plasma source.

Dusty plasma is a four-component plasma consisting of electrons, ions, neutral gas, and microparticles (dust) which collect charge from the surrounding plasma environment. In situ diagnosis of a dusty plasma system with conventional probes is very challenging as the inserted probes can perturb the dust and produce voids. Hence a long-term goal is to use laser-based plasma diagnostics that can be used even in the presence of dust. Here we show the design and characterization of a dusty plasma chamber which has both capacitively and inductively coupled dual plasma sources compatible with parallel plate DC discharges and RF power. This will be used as a target plasma chamber, capable of producing a large range of plasma densities (10^9 – 10^11 cm^-3), along with our tunable, pulsed dye laser, to test laser-based plasma diagnostics techniques such as Laser Induced Fluorescence (LIF) and Cavity Enhanced Absorption Spectroscopy (CEAS).