A Variable Frequency, Mis-Match Tolerant, Inductive Plasma Source

Presented here is a survey and analysis of an inductively coupled, magnetically confined, singly ionized Argon plasma generated by a square-wave, variable frequency plasma source. The helicon-style antenna is driven directly by the class ``D'' amplifier without matching network for increased efficiency while maintaining independent control of frequency and applied power at the feed point. The survey is compared to similar data taken using a traditional exciter---power amplifier---matching network source. Specifically, the flexibility of this plasma source in terms of the independent control of electron plasma temperature and density is discussed in comparison to traditional source arrangements.