An Experimental Investigation of the Theory of Electrostatic Deflections

The so-called ``pull-in'' instability is a ubiquitous feature of electrostatic actuation. In systems where an applied voltage is used to actuate or move mechanical components, it is observed that when the applied voltage exceeds a critical value, electrostatic forces become dominant over elastic forces and the mechanical components ``pull-in'' or collapse into one another. This study of this instability is particularly relevant in the field of microelectromechanical and nanoelectromechanical systems (MEMS \& NEMS), where electrostatic actuation is often used. This instability severely restricts the design space of such systems. Here, key theoretical results concerning this instability are surveyed and compared to a new experimental study of electrostatic deflections. Gaps between theory and experiment are uncovered and directions for future modeling and analysis indicated.