Electron Driven Processes and Their Applications
INVITED · G2
Presentations
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Fundamental Data for Semiconductor Manufacturing Unit Process Modeling and Simulation: Generation, Application and Current Needs
COFFEE_KLATCH · Invited
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Authors
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Peter Ventzek
Freescale Semiconductor Inc.
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New Opportunities in Plasma Production of Radicals and Ions for Treatment of Surfaces
COFFEE_KLATCH · Invited
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Authors
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Mark J. Kushner
Iowa State University
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The Polyatomic Dynamics of Electron-Driven Chemistry
COFFEE_KLATCH · Invited
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Authors
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C. William McCurdy
University of California, Davis and Lawrence Berkeley National Laboratory, Lawrence Berkely National Lab and the University of California-Berkeley and the University of California-Davis
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Elucidating the underlying role of electron-driven processes in atmospheric phenomena
COFFEE_KLATCH · Invited
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Authors
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Michael Brunger
SoCPES, Flinders University, GPO Box 2100, Adelaide, SA 5001 Australia
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