10nm spatial resolution in X-ray PEEM using diamondoid

ORAL

Abstract

The spatial resolution in X-ray Photoemission Electron Microscopy typically does not allow imaging features smaller than 25nm. X-ray PEEM resolution is limited by chromatic aberrations caused by large energy spread of secondary electrons coming off of surface. Diamondoids have recently been shown to act as a monochromator for secondary electrons, thus reducing chromatic aberration in X-ray PEEM. In addition to improving the resolution of the microscope the diamondoid coating will also enhance the image intensity by reducing work function of surface. Without the diamondoid coating, X-ray PEEM reaches detection limit on contrast transfer at 25nm spatial resolution. However with diamondoid coating of surface, we have shown that spatial resolution could reach 10nm spatial resolution creating new record for X-ray PEEM spatial resolution.

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Authors

  • Hitoshi Ishiwata

    Stanford University

  • G.V. Brown

    Department of Physics at CSU, Fresno, Lawrence Livermore National Laboratory, Stanford University, Advanced Light Source, Lawrence Berkeley National Lab, Nanoelectronics Research Institute, Japan Atomic Energy Agency, University of Tokyo, Cornell University, Tokyo Institute of Technology, Suranaree University of Technology, Shandong University, Stanford Synchrotron Radiation Lightsource, UC Davis, CSU Dominguez Hills, Thomas Jefferson National Accelerator Facility, UC Berkeley, ANL, UChicago/ANL, UManitoba, Northwestern U/ANL, LLNL, UCB/LLNL, McGill U, McGill U/ANL, University of Nevada, Reno, Hitachi Global Storage Technology, Advanced Light Source, Stanford Synchrotron Radiation Laboratory, Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Materials Science and Engineering, Stanford University, Radiation Oncology, Stanford University School of Medicine, Missouri University of Science and Technology, International Institute of Physics, University of Missouri, University of Notre Dame du Lac, Department of Physics, California State University, Fresno, California, California State University Long Beach, BNL, IWF Dresden, Department of Physics, University of California, Davis, CA 95616, USA, University of California, Merced, Laboratoire Univers et Particules de Montpellier, IN2P3 (France), SLAC National Accelerator Laboratory/Stanford University/KIPAC, University of Perugia, University of Washington, CEA/Saclay, UNR, UNM, UCSD, RAL, ILE, MIT, LANL, LLE, NRL, SLAC National Accelerator Laboratory, Technische Universitaet Berlin, Max Born Institut, Hiroshima University, Western Michigan University, MPIK

  • G.V. Brown

    Department of Physics at CSU, Fresno, Lawrence Livermore National Laboratory, Stanford University, Advanced Light Source, Lawrence Berkeley National Lab, Nanoelectronics Research Institute, Japan Atomic Energy Agency, University of Tokyo, Cornell University, Tokyo Institute of Technology, Suranaree University of Technology, Shandong University, Stanford Synchrotron Radiation Lightsource, UC Davis, CSU Dominguez Hills, Thomas Jefferson National Accelerator Facility, UC Berkeley, ANL, UChicago/ANL, UManitoba, Northwestern U/ANL, LLNL, UCB/LLNL, McGill U, McGill U/ANL, University of Nevada, Reno, Hitachi Global Storage Technology, Advanced Light Source, Stanford Synchrotron Radiation Laboratory, Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Materials Science and Engineering, Stanford University, Radiation Oncology, Stanford University School of Medicine, Missouri University of Science and Technology, International Institute of Physics, University of Missouri, University of Notre Dame du Lac, Department of Physics, California State University, Fresno, California, California State University Long Beach, BNL, IWF Dresden, Department of Physics, University of California, Davis, CA 95616, USA, University of California, Merced, Laboratoire Univers et Particules de Montpellier, IN2P3 (France), SLAC National Accelerator Laboratory/Stanford University/KIPAC, University of Perugia, University of Washington, CEA/Saclay, UNR, UNM, UCSD, RAL, ILE, MIT, LANL, LLE, NRL, SLAC National Accelerator Laboratory, Technische Universitaet Berlin, Max Born Institut, Hiroshima University, Western Michigan University, MPIK

  • G.V. Brown

    Department of Physics at CSU, Fresno, Lawrence Livermore National Laboratory, Stanford University, Advanced Light Source, Lawrence Berkeley National Lab, Nanoelectronics Research Institute, Japan Atomic Energy Agency, University of Tokyo, Cornell University, Tokyo Institute of Technology, Suranaree University of Technology, Shandong University, Stanford Synchrotron Radiation Lightsource, UC Davis, CSU Dominguez Hills, Thomas Jefferson National Accelerator Facility, UC Berkeley, ANL, UChicago/ANL, UManitoba, Northwestern U/ANL, LLNL, UCB/LLNL, McGill U, McGill U/ANL, University of Nevada, Reno, Hitachi Global Storage Technology, Advanced Light Source, Stanford Synchrotron Radiation Laboratory, Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Materials Science and Engineering, Stanford University, Radiation Oncology, Stanford University School of Medicine, Missouri University of Science and Technology, International Institute of Physics, University of Missouri, University of Notre Dame du Lac, Department of Physics, California State University, Fresno, California, California State University Long Beach, BNL, IWF Dresden, Department of Physics, University of California, Davis, CA 95616, USA, University of California, Merced, Laboratoire Univers et Particules de Montpellier, IN2P3 (France), SLAC National Accelerator Laboratory/Stanford University/KIPAC, University of Perugia, University of Washington, CEA/Saclay, UNR, UNM, UCSD, RAL, ILE, MIT, LANL, LLE, NRL, SLAC National Accelerator Laboratory, Technische Universitaet Berlin, Max Born Institut, Hiroshima University, Western Michigan University, MPIK

  • G.V. Brown

    Department of Physics at CSU, Fresno, Lawrence Livermore National Laboratory, Stanford University, Advanced Light Source, Lawrence Berkeley National Lab, Nanoelectronics Research Institute, Japan Atomic Energy Agency, University of Tokyo, Cornell University, Tokyo Institute of Technology, Suranaree University of Technology, Shandong University, Stanford Synchrotron Radiation Lightsource, UC Davis, CSU Dominguez Hills, Thomas Jefferson National Accelerator Facility, UC Berkeley, ANL, UChicago/ANL, UManitoba, Northwestern U/ANL, LLNL, UCB/LLNL, McGill U, McGill U/ANL, University of Nevada, Reno, Hitachi Global Storage Technology, Advanced Light Source, Stanford Synchrotron Radiation Laboratory, Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Materials Science and Engineering, Stanford University, Radiation Oncology, Stanford University School of Medicine, Missouri University of Science and Technology, International Institute of Physics, University of Missouri, University of Notre Dame du Lac, Department of Physics, California State University, Fresno, California, California State University Long Beach, BNL, IWF Dresden, Department of Physics, University of California, Davis, CA 95616, USA, University of California, Merced, Laboratoire Univers et Particules de Montpellier, IN2P3 (France), SLAC National Accelerator Laboratory/Stanford University/KIPAC, University of Perugia, University of Washington, CEA/Saclay, UNR, UNM, UCSD, RAL, ILE, MIT, LANL, LLE, NRL, SLAC National Accelerator Laboratory, Technische Universitaet Berlin, Max Born Institut, Hiroshima University, Western Michigan University, MPIK

  • G.V. Brown

    Department of Physics at CSU, Fresno, Lawrence Livermore National Laboratory, Stanford University, Advanced Light Source, Lawrence Berkeley National Lab, Nanoelectronics Research Institute, Japan Atomic Energy Agency, University of Tokyo, Cornell University, Tokyo Institute of Technology, Suranaree University of Technology, Shandong University, Stanford Synchrotron Radiation Lightsource, UC Davis, CSU Dominguez Hills, Thomas Jefferson National Accelerator Facility, UC Berkeley, ANL, UChicago/ANL, UManitoba, Northwestern U/ANL, LLNL, UCB/LLNL, McGill U, McGill U/ANL, University of Nevada, Reno, Hitachi Global Storage Technology, Advanced Light Source, Stanford Synchrotron Radiation Laboratory, Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Materials Science and Engineering, Stanford University, Radiation Oncology, Stanford University School of Medicine, Missouri University of Science and Technology, International Institute of Physics, University of Missouri, University of Notre Dame du Lac, Department of Physics, California State University, Fresno, California, California State University Long Beach, BNL, IWF Dresden, Department of Physics, University of California, Davis, CA 95616, USA, University of California, Merced, Laboratoire Univers et Particules de Montpellier, IN2P3 (France), SLAC National Accelerator Laboratory/Stanford University/KIPAC, University of Perugia, University of Washington, CEA/Saclay, UNR, UNM, UCSD, RAL, ILE, MIT, LANL, LLE, NRL, SLAC National Accelerator Laboratory, Technische Universitaet Berlin, Max Born Institut, Hiroshima University, Western Michigan University, MPIK