Laser induced damage characteristics of optical thin film with ion assisted planarization and annealing

ORAL

Abstract

Ion beam sputtering growth of amorphous oxides coupled with processing using Ar ion assist is termed \textit{planarization}. This process was introduced by our team reducing defect cross-section on pre-patterned substrates by up to 90{\%} and increasing laser damage performance by 10x The effects of SiO$_{\mathrm{2}}$ planarization processing on the laser damage resistance of single, bilayers, and multilayer coatings of HfO$_{\mathrm{2}}$ and SiO$_{\mathrm{2}}$ is investigated at pulse durations of 9ps and 220ps. Planarized samples experience a large increase in absorption loss at 1\textmu m wavelength, which is reduced after in-air annealing suggesting presence of oxygen point defects. It is shown the laser damage threshold reduces with planarized SiO$_{\mathrm{2}}$ layers directly implemented compared to control samples at both pulse durations. In-air annealing instead shows a recovery of the laser damage threshold.

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Authors

  • Hanchen Wang

    Department of Physics, Colorado State University, Physics Department, Colorado State University, Fort Collins, Co 80525, Colorado State Univ

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source

  • Colin Roberts

    High Precision Devices, Boulder, CO, Raytheon, Tucson, AZ, Seagate Technology, Minneapolis, MN, Ball Aerospace (retired), Bloomfield, CO, New Mexico State University, Brigham Young University, Colorado State University, Heinrich-Heine-Universitat Dusseldorf, National Security Technologies, Universidad de Buenos Aires, Colorado State Univ, Colorado College, Utah State University, Advisor, Material Physics Group, Utah State University, Box Elder Innovations, LLC, JILA and Department of Physics, CU Boulder, JILA and Department of Mathematics, CU Boulder, Colorado State University, Fort Collins, Colorado 80523, USA, JILA, NIST and the University of Colorado, Boulder, NIST, University of Colorado / NIST, University of Colorado/JILA, Colorado Sch of Mines, Colorado School of Mines, Southwestern Indian Polytechnic Institute, UC-Berkeley, Colorado State University, Fort Collins, CO, Wroclaw University of Science and Technology, Wroclaw, Poland, JILA, University of Colorado and NIST, Harvard University and Harvard-MIT Center for Ultracold Atoms, Univ of Colorado - Boulder, USAFA, Univ of Denver, Boyce Research Initiatives and Educational Foundation, Brilliant Sky Observatory, San Diego Mesa College, Utah Valley University, University of Colorado Boulder, Brigham Young Univ - Provo, Oak Ridge National Laboratory, University of Sherbrooke, NIST Boulder, Universidad Complutense de Madrid, Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Co 80525, Lawrence Livermore National Lab. (United States), Physics Department, Colorado State University, Fort Collins, Co 80525, JILA, Department of Physics, University of Colorado Boulder, Los Alamos National Laboratory, University of Alabama, University of Wyoming, University of Guelph, University of Guelph, Canadian Light source