Plasma Enhanced Atomic Layer Deposition Nucleation Performance on Atomically Smooth Graphene Surfaces

POSTER

Abstract

Electronics using graphene may lead to the next generation of computation and innovative devices. Layering dielectrics with graphene is key to realizing many of these functional devices. Plasma enhanced atomic layer deposition (PEALD) is a novel way to introduce dielectrics to graphene, however graphene is susceptible to etching by PEALD. This motivates us to explore the role of graphene quality on film nucleation and graphene robustness. In this experiment we will use spectroscopy and atomic force microscopy to quantify film and graphene quality. Here we will present the experimental design, initial findings and theory behind this upcoming research. At the current stage of experimentation sample holders have been designed and machined, control C-AFM data has shown smoothness of 4-6 nm with strong conductivity. We discuss how graphene quality, plasma conditions, and ample geometry may play a role in post-PEALD graphene quality and film nucleation.

Authors

  • Trevor Van Engelhoven

    Arizona State University

  • Anna Zaniewski

    Arizona State University

  • Scott D. Bergesen

    Santa Fe Institute, Arizona State University, Department of Physics and Center for Biological Physics, Arizona State University, Brigham Young University Department of Physics and Astronomy, Brigham Young University, Utah Valley University, Dixie State College, Advisor, Student, Massachusetts Institute of Technology, Thomas Jefferson National Accelerator Laboratory, Colorado College, United States Air Force Academy, Georgia Institute of Technology, Utah State University, Brigham Young University - Idaho, Utah State University- Logan, National Institute of Standards and Technology, Humboldt State University, UC Santa Cruz, Institut de Chimie des Substances Naturelles, Arizona State Univ, University of Colorado at Colorado Springs, National Jewish Health, Department of Physics, The University of Texas at Austin, Department of Physics, New Mexico State University, U. S. Air Force Academy, Brigham Young Univ - Provo, University of New South Wales, University of Texas, University of Warwick, University of Louisiana, Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA., Center for Materials Genomics, Department of Mechanical Engineering and Materials Science and Department of Physics, Duke University, Durham, North Ca, Duke University, Durham, North Carolina., Brigham Young University -- Provo, Utah, General Atomics -- San Diego, California, Department of Mathematics, University of British Columbia, Department of Physics, Arizona State University, UC Riverside, UMASS, STScI, NOAO, UT Austin, Texas A&M, Arizona State Univeristy, New Mexico State Univ, Los Alamos National Laboratory, Colorado State Univ, Department of Physics, Oregon State University, Colorado School of Mines, University of Alaska, Fairbanks, The Peac Institute of Multiscale Modeling, UNSW Canberra

  • Scott D. Bergesen

    Santa Fe Institute, Arizona State University, Department of Physics and Center for Biological Physics, Arizona State University, Brigham Young University Department of Physics and Astronomy, Brigham Young University, Utah Valley University, Dixie State College, Advisor, Student, Massachusetts Institute of Technology, Thomas Jefferson National Accelerator Laboratory, Colorado College, United States Air Force Academy, Georgia Institute of Technology, Utah State University, Brigham Young University - Idaho, Utah State University- Logan, National Institute of Standards and Technology, Humboldt State University, UC Santa Cruz, Institut de Chimie des Substances Naturelles, Arizona State Univ, University of Colorado at Colorado Springs, National Jewish Health, Department of Physics, The University of Texas at Austin, Department of Physics, New Mexico State University, U. S. Air Force Academy, Brigham Young Univ - Provo, University of New South Wales, University of Texas, University of Warwick, University of Louisiana, Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA., Center for Materials Genomics, Department of Mechanical Engineering and Materials Science and Department of Physics, Duke University, Durham, North Ca, Duke University, Durham, North Carolina., Brigham Young University -- Provo, Utah, General Atomics -- San Diego, California, Department of Mathematics, University of British Columbia, Department of Physics, Arizona State University, UC Riverside, UMASS, STScI, NOAO, UT Austin, Texas A&M, Arizona State Univeristy, New Mexico State Univ, Los Alamos National Laboratory, Colorado State Univ, Department of Physics, Oregon State University, Colorado School of Mines, University of Alaska, Fairbanks, The Peac Institute of Multiscale Modeling, UNSW Canberra

  • Scott D. Bergesen

    Santa Fe Institute, Arizona State University, Department of Physics and Center for Biological Physics, Arizona State University, Brigham Young University Department of Physics and Astronomy, Brigham Young University, Utah Valley University, Dixie State College, Advisor, Student, Massachusetts Institute of Technology, Thomas Jefferson National Accelerator Laboratory, Colorado College, United States Air Force Academy, Georgia Institute of Technology, Utah State University, Brigham Young University - Idaho, Utah State University- Logan, National Institute of Standards and Technology, Humboldt State University, UC Santa Cruz, Institut de Chimie des Substances Naturelles, Arizona State Univ, University of Colorado at Colorado Springs, National Jewish Health, Department of Physics, The University of Texas at Austin, Department of Physics, New Mexico State University, U. S. Air Force Academy, Brigham Young Univ - Provo, University of New South Wales, University of Texas, University of Warwick, University of Louisiana, Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA., Center for Materials Genomics, Department of Mechanical Engineering and Materials Science and Department of Physics, Duke University, Durham, North Ca, Duke University, Durham, North Carolina., Brigham Young University -- Provo, Utah, General Atomics -- San Diego, California, Department of Mathematics, University of British Columbia, Department of Physics, Arizona State University, UC Riverside, UMASS, STScI, NOAO, UT Austin, Texas A&M, Arizona State Univeristy, New Mexico State Univ, Los Alamos National Laboratory, Colorado State Univ, Department of Physics, Oregon State University, Colorado School of Mines, University of Alaska, Fairbanks, The Peac Institute of Multiscale Modeling, UNSW Canberra

  • Scott D. Bergesen

    Santa Fe Institute, Arizona State University, Department of Physics and Center for Biological Physics, Arizona State University, Brigham Young University Department of Physics and Astronomy, Brigham Young University, Utah Valley University, Dixie State College, Advisor, Student, Massachusetts Institute of Technology, Thomas Jefferson National Accelerator Laboratory, Colorado College, United States Air Force Academy, Georgia Institute of Technology, Utah State University, Brigham Young University - Idaho, Utah State University- Logan, National Institute of Standards and Technology, Humboldt State University, UC Santa Cruz, Institut de Chimie des Substances Naturelles, Arizona State Univ, University of Colorado at Colorado Springs, National Jewish Health, Department of Physics, The University of Texas at Austin, Department of Physics, New Mexico State University, U. S. Air Force Academy, Brigham Young Univ - Provo, University of New South Wales, University of Texas, University of Warwick, University of Louisiana, Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA., Center for Materials Genomics, Department of Mechanical Engineering and Materials Science and Department of Physics, Duke University, Durham, North Ca, Duke University, Durham, North Carolina., Brigham Young University -- Provo, Utah, General Atomics -- San Diego, California, Department of Mathematics, University of British Columbia, Department of Physics, Arizona State University, UC Riverside, UMASS, STScI, NOAO, UT Austin, Texas A&M, Arizona State Univeristy, New Mexico State Univ, Los Alamos National Laboratory, Colorado State Univ, Department of Physics, Oregon State University, Colorado School of Mines, University of Alaska, Fairbanks, The Peac Institute of Multiscale Modeling, UNSW Canberra

  • Scott D. Bergesen

    Santa Fe Institute, Arizona State University, Department of Physics and Center for Biological Physics, Arizona State University, Brigham Young University Department of Physics and Astronomy, Brigham Young University, Utah Valley University, Dixie State College, Advisor, Student, Massachusetts Institute of Technology, Thomas Jefferson National Accelerator Laboratory, Colorado College, United States Air Force Academy, Georgia Institute of Technology, Utah State University, Brigham Young University - Idaho, Utah State University- Logan, National Institute of Standards and Technology, Humboldt State University, UC Santa Cruz, Institut de Chimie des Substances Naturelles, Arizona State Univ, University of Colorado at Colorado Springs, National Jewish Health, Department of Physics, The University of Texas at Austin, Department of Physics, New Mexico State University, U. S. Air Force Academy, Brigham Young Univ - Provo, University of New South Wales, University of Texas, University of Warwick, University of Louisiana, Department of Physics and Astronomy, Brigham Young University, Provo, Utah 84602, USA., Center for Materials Genomics, Department of Mechanical Engineering and Materials Science and Department of Physics, Duke University, Durham, North Ca, Duke University, Durham, North Carolina., Brigham Young University -- Provo, Utah, General Atomics -- San Diego, California, Department of Mathematics, University of British Columbia, Department of Physics, Arizona State University, UC Riverside, UMASS, STScI, NOAO, UT Austin, Texas A&M, Arizona State Univeristy, New Mexico State Univ, Los Alamos National Laboratory, Colorado State Univ, Department of Physics, Oregon State University, Colorado School of Mines, University of Alaska, Fairbanks, The Peac Institute of Multiscale Modeling, UNSW Canberra