Three-D Dielectric Capacitor

Integrated circuits have increased in complexity and decreased in size for over 50 years. They are ubiquitous and relied upon heavily in modern society. Capacitors are an essential part of almost every complete electronic device. We are developing capacitors for on-chip integration with much higher capacitance per area and volume than currently used silicon-based trench capacitors. We have worked with Arradiance, Inc. to conformally coat dense carbon nanotube arrays with hafnium oxide and will soon have tested capacitor prototypes as we improve the coating uniformity.