High-Aspect-Ratio Metal Microfabrication by Nickel Electroplating of Patterned Carbon Nanotube Forests

We have developed a process that is able to create metallic MEMS with over 20:1 aspect ratios through nickel electroplating patterned carbon coated carbon nanotube forests. Densities include about 85{\%} bulk nickel (7.3-7.98 g/cm$^{3})$ with an elastic modulus of approximately 42 GPa and a strength of 400 MPa. 7 mN actuation forces were achieved. Applications for a wealth of actuators and similar MEMS devices could be envisioned with this composite material. The process of nickel electroplating carbon nanotube forests will be explained along with material properties testing.