Electrostatic Discharge Properties of Fused Silica Coatings

POSTER

Abstract

The electric field value at which electrostatic discharge (ESD) occurs was studied for thin coatings of fused silica (highly disordered SiO2/SiOx) on conductive substrates, such as those encountered as optical coatings and in Si microfabrication. The electrostatic breakdown field was determined using an increasing voltage, while monitoring the leakage current. A simple parallel-plate capacitor geometry was used, under medium vacuum and at temperatures down to $\sim $150 K using a liquid N2 reservoir. The breakdown field, pre-breakdown arcing and I-V curves for fused silica samples are compared for $\sim $60 nm and $\sim $80 $\mu $m thick, room and low temperature, and untreated and irradiated samples. Unlike typical I-V results for polymeric insulators, the thin film silica samples did not exhibit pre-breakdown arcing, displayed transitional resistivity after initial breakdown, and in many cases showed evidence of a second discontinuity in the I-V curves. This diversity of observed discharge phenomena is discussed in terms of breakdown modes and defect generation on a microscopic scale.

Authors

  • Allen Andersen

    USU Materials Physics Group

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines