Power and Charge Deposition in Multilayer Dielectrics from Monoenergetic Electron Bombardment

ORAL

Abstract

Power and charge deposition in multilayer dielectrics from electron bombardment is dependent upon the flux and electron range of the electron beam, where the range,--also known as the penetration depth---is dependent upon the incident beam energy. Using the Continuous Slow Down Approximation (CSDA), a composite analytical formula has been developed to relate the electron range to the dose rate and subsequently to the deposited power in each subsequent layer. Based on the constituent layer geometry and material, the deposited charge can also be inferred. To validate these models two separate experiments were conducted, one based on the net surface potential and the second on electron induced luminescence. The first experiment used a disordered SiO$_{2}$ based multilayer dielectric with a conductive middle layer. The sample was charged using 15 s pulses from an electron beam with an energy range from 200 eV to 5 keV. The second experiment also used a disordered SiO$_{2}$ based multilayer dielectric, but with energies from 5 keV to 25 keV. Results of these experiments showed the power and charge deposition's dependence on electron beam flux and incident energy, which compare favorably with the model predictions.

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Authors

  • Gregory Wilson

    USU Materials Physics Group, Utah State University

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines