Wet Nano-Bonding of Silica-to-Si and Silica-to-Silica below 200$^{\circ}$ C by H2O catalysis and a 2-D precursor phase: TMAFM, Hydroaffinity and Surface Free Energy Analysis

ORAL

Abstract

Hydroxylated silica about 2.1 $\pm$ 0.1 nm thick are nucleated on OH(1x1)Si(100) as precursor phase to cross-bond directly silica to Si, and silica to silica using planarization via extended atomic terraces, T$\le $ 200$^{\circ}$C, an H2O/O2 ambient, and p $\ge $ 1 atm. This method,``Wet Nano-Bonding\texttrademark,'' relies on the Herbots-Atluri process [1] to nucleate precursor phases to bond via direct hydroxylated silica molecular cross-bridges two surfaces brought into contact at the nano-scale. Ordered Si2(OH)4 $\beta $-cristobalite precursor phases exhibit atomic terraces that extend to \textgreater 20 nm, in contrast to the 2 nm width in ``as received'' Si(100) wafers. $\beta $-cristobalite nano-phases can desorb at low temperatures (T \textless / $\sim$ 200$^{\circ}$ C) [3]. These ordered oxides can promote the growth of flatter, smoother, better controlled oxides at low temperatures in ambient air. When put into close contact at T$\ge $ 200$^{\circ}$ C with oxygen-deficient phases of SiOx used in microelectronics, they can consistently nucleate a cross-bridging between the two substrates, or ``nano-bonding'' inter-phase [4] between various combinations Si and silica provided an H2O/O2 ambient catalyzes low temperature oxidation and nano-contacting is achieved via pressurization in the nano-bonding chamber.

–

Authors

  • Ross Bennett-Kennett

    Arizona State University

  • Shawn Whaley

    Arizona State University

  • Nicole Herbots

    Arizona State University

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Ashlee Murphy

    Arizona State University

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines

  • Norm Buchanan

    Brigham Young University, Stanford University, University of Central Florida, NCAR/High Altitude Observatory, Arizona Vitro-retinal consultants, University of Michigan, Arizona State University, University of Denver, Arizona State University Dept of Physics, Arizona State University Dept of Chemistry and Biochemistry, LASP, University of Colorado Boulder, Center for Atmospheric and Space Science, Utah State University, Dixie State College, Utah, USU Materials Physics Group, UVU Physics Department, Box Elder Innovations, Space Telescope Science Institute, Northern Kentucky University, Retired, Utah Valley University, Univ. of California, Los Angelos, Colorado State University, St. Petersburg Electro-technical University, Universidad Nacional Aut\'onoma de M\'exico, New Mexico State University, University of New Mexico, University of Wurtzberg, Theoretical Division, Los Alamos National Laboratory, National High Magnetic Field Laboratory, LANL, UCLA, Max-planck-Institut f\"{u}r Astronomie, W. M. Keck Observatory, University of Arizona, Nuclear Physics Group, Brigham Young University, GLOBALFOUNDRIES, IBM Systems and Technology Group, IBM Research Division, T.J. Watson Research Center, Sandia National Laboratory, NMSU, Military University of Technology, Warsaw, Poland, James Franck Institute and Department of Physics, University of Chicago, Department of Atmospheric Sciences, University of Washington, JISAO, University of Washington, New Mexico Institute of Mining and Technology, NorthWest Research Associates, University of Alaska, Fairbanks, Utah State University, New Mexico Tech, University of Cambridge, Los Alamos National Laboratory, RAPTOR Science, Institute of Space and Astronomical Science, Japanese Aerospace Exploration Agency, Weber State University, Department of Physics, New Mexico State University, BYU Physics, Physics Department, University of Arizona, ABQMR, University of Colorado at Boulder, SNL and CINT, Los Alamos National Lab, Center for Quantum Information and Control, University of Arizona, Center for Quantum Information and Control, University of New Mexico, University of Calgary, Colorado School of Mines