Mechanical and Electrical Properties of Carbon Nanotube Templated Metal Microstructures

ORAL

Abstract

Our group has used vertically aligned carbon nanotubes as a patterned, three-dimensional microfabrication scaffold to create CNT composite materials through chemical vapor infiltration. This method, termed carbon nanotube templated microfabrication (CNT-M), is a novel approach for creating precise high-aspect-ratio microstructures. In the past, dielectrics (SiO$_{2}$ and SiN$_{x})$ and semiconductors (Si and a-C) were the materials deposited on the CNT framework. Production and characterization of metallic microstructures is in its infancy. This study presents electrical, mechanical and structural properties of \textit{metallic} microstructures made using tungsten and molybdenum carbonyl precursors through the CNT-M process.

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Authors

  • Richard Hansen

    Department of Physics and Astronomy, Brigham Young University

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab