EUV Scintillator for Localization and Detection of Laser Beam

POSTER

Abstract

We set out to find a means of detecting and locating an EUV laser beam at the wavelength of 46.9 nm in real time. This will facilitate the alignment of our experiments in nano-patterning, nano-fabrication, and holography, consequently allowing multiple experiments to be aligned simultaneously. Methods of detection are either CCD cameras or prints made with Poly(methyl methacrylate) (PMMA) on a coated wafer, neither of which are efficient to operate. We describe the implementation of an alternative imaging method which combines a phosphor scintillator and a web-cam. Using a phosphor scintillator screen provided by Applied Scintillations Technologies Limited the detection and localization of the EUV laser beam at 46.9 nm was seen consistently through reflection providing a distinct image of the beam in the initial tests. We were able to capture an image of the beam using the webcam through the use of a user interface developed in labview which allowed a snap shot to be taken at the exact moment the beam past through the screen.

Authors

  • Nils Monserud

    Colorado State University

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab