Extreme Ultraviolet lithography by de-magnified generalized Talbot imaging

ORAL

Abstract

We present first to our knowledge demonstration of Extreme Ultraviolet (EUV) lithography scheme based on de-magnified generalized Talbot imaging. A self image of a periodic mask is de-magnified and recorded in photoresist resulting in a scaled down image of the mask. De-magnification is achieved by introducing a converging beam illumination. The illumination source is 46.9nm neon-like argon laser, which emits highly temporally and spatially coherent EUV light. This laser provides high resolution printing due to short wavelength of illumination. Presented method enables cost effective, high resolution printing of arrays of arbitrary patterns over large areas in a noncontact mode which can be further de-magnified by several tens of percent.

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Authors

  • Lukasz Urbanski

    Colorado State University

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab

  • Young-Yeal Song

    Brigham Young University, Colorado School of Mines, Colorado State University, Yale University, Department of Physics and Astronomy, Brigham Young University, Department of Mechanical Engineering, University of Utah, JILA, NIST and University of Colorado, University of Arizona, MIT, National Institute for Materials Science, Japan, Department of Mechanical Engineering, Brigham Young University, University of New Mexico, Iowa State University, Los Alamos National Lab XCP-2, Utah State University, Weber State University, New Mexico State University, College of Optical Science, University of Arizona, University of Nebraska, Lincoln, J.A. Woollam Co., U.S. Naval Research Laboratory, Arizona State University, BYU Nuclear Physics Group, Brigham Young University Physics and Astronomy, Los Alamos National Laboratory, University of Tsukuba, Japan, Colorado State University, NSF ERC for EUV science and technology, Center for Functional Nanomaterials, Brookhaven National Laboratory, University of Wisconsin, Madison, Utah Valley University, Argonne National Lab