Economical Atomic Layer Deposition

ORAL

Abstract

Atomic Layer Deposition is a self limiting deposition process that can produce films at a user specified height. At BYU we have designed a low cost and automated atomic layer deposition system. We have used the system to deposit silicon dioxide at room temperature using silicon tetrachloride and tetramethyl orthosilicate. Basics of atomic layer deposition, the system set up, automation techniques and our system's characterization are discussed.

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Authors

  • Richard Wyman

    Brigham Young University

  • Andrew Polemi

    Utah State University, Brigham Young University, University of Pennsylvania, Lawrence Livermore National Laboratory, Los Alamos National Laboratory, High Altitude Observatory, University of Colorado at Boulder, Massachutes Institute of Technology, Utah Valley University, University of New Hampshire, Applied Physics Laboratory, Johns Hopkins University, University of Montana, Southwest Research Institute, University of Southern California, Lockheed Martin Advanced Technology Center, University of Chicago, Massachusetts Institute of Technology, SciPrint.org, Centre National de la Recherche Scientifique, Colorado State University, V. Alecsandri College, Bacau, Romania, Colorado School of Mines, National Renewable Energy Laboratory, Utah State University, Department of Physics, Brigham Young University, Provo, Huntsman Cancer Institute, Brigham Young University - Idaho, University of Arizona, Florida State University, Weber State University, Brigham Young University - Provo, New Mexico State University, Colorado State University, Fort Collins, CO 80523

  • Andrew Polemi

    Utah State University, Brigham Young University, University of Pennsylvania, Lawrence Livermore National Laboratory, Los Alamos National Laboratory, High Altitude Observatory, University of Colorado at Boulder, Massachutes Institute of Technology, Utah Valley University, University of New Hampshire, Applied Physics Laboratory, Johns Hopkins University, University of Montana, Southwest Research Institute, University of Southern California, Lockheed Martin Advanced Technology Center, University of Chicago, Massachusetts Institute of Technology, SciPrint.org, Centre National de la Recherche Scientifique, Colorado State University, V. Alecsandri College, Bacau, Romania, Colorado School of Mines, National Renewable Energy Laboratory, Utah State University, Department of Physics, Brigham Young University, Provo, Huntsman Cancer Institute, Brigham Young University - Idaho, University of Arizona, Florida State University, Weber State University, Brigham Young University - Provo, New Mexico State University, Colorado State University, Fort Collins, CO 80523