Deposition of Metals via Chemical Vapor Deposition

ORAL

Abstract

In an effort to develop a CVD process to deposit metals on various substrates I have created a multi-gas system with a computer controlled interface. This allows the use of up to 5 different gasses as reactants or carriers for the CVD process. I have also fabricated a specialized heated [gas flow chamber wherein solid materials can be volatilized with heat and carried to the substrate by gas also heated in the chamber. I will present the design of this chamber and it's function in our current deposition process along with preliminary results of the deposition of tungsten on various substrates.

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Authors

  • David McKenna

    Brigham Young University

  • Andrew Polemi

    Utah State University, Brigham Young University, University of Pennsylvania, Lawrence Livermore National Laboratory, Los Alamos National Laboratory, High Altitude Observatory, University of Colorado at Boulder, Massachutes Institute of Technology, Utah Valley University, University of New Hampshire, Applied Physics Laboratory, Johns Hopkins University, University of Montana, Southwest Research Institute, University of Southern California, Lockheed Martin Advanced Technology Center, University of Chicago, Massachusetts Institute of Technology, SciPrint.org, Centre National de la Recherche Scientifique, Colorado State University, V. Alecsandri College, Bacau, Romania, Colorado School of Mines, National Renewable Energy Laboratory, Utah State University, Department of Physics, Brigham Young University, Provo, Huntsman Cancer Institute, Brigham Young University - Idaho, University of Arizona, Florida State University, Weber State University, Brigham Young University - Provo, New Mexico State University, Colorado State University, Fort Collins, CO 80523

  • Andrew Polemi

    Utah State University, Brigham Young University, University of Pennsylvania, Lawrence Livermore National Laboratory, Los Alamos National Laboratory, High Altitude Observatory, University of Colorado at Boulder, Massachutes Institute of Technology, Utah Valley University, University of New Hampshire, Applied Physics Laboratory, Johns Hopkins University, University of Montana, Southwest Research Institute, University of Southern California, Lockheed Martin Advanced Technology Center, University of Chicago, Massachusetts Institute of Technology, SciPrint.org, Centre National de la Recherche Scientifique, Colorado State University, V. Alecsandri College, Bacau, Romania, Colorado School of Mines, National Renewable Energy Laboratory, Utah State University, Department of Physics, Brigham Young University, Provo, Huntsman Cancer Institute, Brigham Young University - Idaho, University of Arizona, Florida State University, Weber State University, Brigham Young University - Provo, New Mexico State University, Colorado State University, Fort Collins, CO 80523