Growth and characterization of transition metal oxide thin films by dual ion beam sputtering

POSTER

Abstract

The development of high power lasers operating in the near infrared heavily relies on the availability of robust optical coatings. We present results on the growth and characterization of transition metal oxide thin films by dual ion beam sputtering. Single layer films are grown under different conditions and characterized for their structural, chemical and optical properties using glancing angle x-ray diffraction, variable angle spectroscopic ellipsometry, x-ray photoelectron spectroscopy, photothermal commonpath interferometry, laser-induced damage threshold studies and atomic force microscopy. The laser damage threshold for single pulse (1-on-1) and multiple pulses ($S$-on-1) has also been measured. The results of these experiments have revealed the important role that native impurities and laser created excitonic effects have on the optical response of the single layer films. Results on interference coatings with superior performance will also be presented.

Authors

  • Erik Krous

    Colorado State University

  • Peter Langston

    Colorado State University

  • Dinesh Patel

    Colorado State University

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines

  • John Poate

    Brigham Young University, Los Alamos National Laboratory, Department of Physics and Astronomy, University of Utah, USA, MV Systems, Inc., USA, Helmholtz-Zentrum Berlin fuer Materialien und Energie, Abteilung Silizium-Photovoltaik, Germany, Colorado School of Mines, Department of Physics, USA, Georgia Institute of Technology, Arizona State University, Physics Department of Babolsar University, Iran, Physics Department, New Mexico State University, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287-1604, USA, Department of Electrical Engineering, University of Arkansas, Fayetteville, AR 72701, USA, Department of Physics, Arizona State University, Tempe, AZ, 85287-1504, USA, Colorado State University, University of Wisconsin, NSF ERC for Extreme Ultraviolet Science and Technology, Colorado State University, BYU-Provo, Michigan Technical University and Pierre Auger Collaboration, University of Colorado, Colorado School of Mines, Department of Physics, Colorado State University, Department of Physics, Cornell University, NASA, University of Massachusetts at Amherst, University of Massachusetss at Amherst, APS President, Harvard University, Society of Physics Students, Duke University, Computer Science, Brigham Young University, Chemistry \& Biochemistry, Brigham Young University, University of Arizona, University of Utah, Kansas State Univ., Bethel University, University of New Mexico, Stanford University, JILA, University of Colorado at Boulder, NIST, JILA, University of Colorado at Boulder, National Renewable Energy Laboratory, University of Denver, University of Colorado, Boulder, NREL, Department of Chemistry and Biochemistry, Arizona State University, Tempe, AZ, 85287- 1604, USA, DU, ERI, Eleanor Roosevelt Institute (ERI), Cerro Tololo Interamerican Observatory, Utah State University, Center for Atmospheric and Space Sciences, Sciprint.org, University of Colorado at Boulder, JILA and University of Colorado, Kirchhoff Institute for Physics, University of Heidelberg, Utah Valley University, University of New South Wales, San Francisco State University, Weber State University, Cambridge University, Department of Physics and Astronomy, University of Utah, Kansas State University, Columbia University, NY, University of Colorado/JILA, Vice-President for Research and Technology Transfer, Colorado School of Mines