Spectroscopic Ellipsometry And Variable-Angle XPS Scanning

ORAL

Abstract

The extreme ultraviolet portion of the EM spectrum from 10-100 nm is becoming increasingly important in various technological applications. However, the optical constants in this region are not well known and need further determination. This is done by observing the interaction of EUV light with thin metallic films. It is essential that the composition and thickness of the film are well characterized in order to determine the optical constants. Depth profiling and angle resolved x-ray photoelectron spectroscopy (XPS) are used to characterize the composition of the films. The extent of oxidation at the surface of the films is of particular interest. Current research is focused on determining how spectroscopic ellipsometry and variable-angle XPS scans increase understanding of this oxidation.

Authors

  • Stanley C. Solomon

    University of California and Lawrence Berkeley National Laboratory, Rutgers University, Utah State University, Brigham Young University, University of Utah, NASA, Duke University, FMA Research, Colorado State University, Dartmouth University, Idaho State University, Physics Department, Idaho State University, Physics Department, Utah State University, Los Alamos National Laboratory, Department of Physics, Nanjing University, China, University of California at Riverside, Physics Department, Colorado School of Mines, Physics Department, University of Utah, University of Nebraska - Lincoln, USU, Society of Physics Students, Arizona State University, Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan, LANSCE-LC, Los Alamos National Laboratory, Van der Waals-Zeeman Institute, University of Amsterdam, Chemistry and Physics Dept., Virginia State University, University of Saskatchewan, Canada, Chalk River Laboratories, Physics Dept, Oxford University, Physics Dept, Utah State University, Sandia National Laboratories, National Renewable Energy Laboratory, DOE Center for Integrated Nanotechnologies, Sandia National Laboratories, National Center for Atmospheric Research

  • Stanley C. Solomon

    University of California and Lawrence Berkeley National Laboratory, Rutgers University, Utah State University, Brigham Young University, University of Utah, NASA, Duke University, FMA Research, Colorado State University, Dartmouth University, Idaho State University, Physics Department, Idaho State University, Physics Department, Utah State University, Los Alamos National Laboratory, Department of Physics, Nanjing University, China, University of California at Riverside, Physics Department, Colorado School of Mines, Physics Department, University of Utah, University of Nebraska - Lincoln, USU, Society of Physics Students, Arizona State University, Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan, LANSCE-LC, Los Alamos National Laboratory, Van der Waals-Zeeman Institute, University of Amsterdam, Chemistry and Physics Dept., Virginia State University, University of Saskatchewan, Canada, Chalk River Laboratories, Physics Dept, Oxford University, Physics Dept, Utah State University, Sandia National Laboratories, National Renewable Energy Laboratory, DOE Center for Integrated Nanotechnologies, Sandia National Laboratories, National Center for Atmospheric Research

  • Stanley C. Solomon

    University of California and Lawrence Berkeley National Laboratory, Rutgers University, Utah State University, Brigham Young University, University of Utah, NASA, Duke University, FMA Research, Colorado State University, Dartmouth University, Idaho State University, Physics Department, Idaho State University, Physics Department, Utah State University, Los Alamos National Laboratory, Department of Physics, Nanjing University, China, University of California at Riverside, Physics Department, Colorado School of Mines, Physics Department, University of Utah, University of Nebraska - Lincoln, USU, Society of Physics Students, Arizona State University, Institute for Materials Science (NIMS), Namiki 1-1, Tsukuba, Ibaraki 305-0044, Japan, LANSCE-LC, Los Alamos National Laboratory, Van der Waals-Zeeman Institute, University of Amsterdam, Chemistry and Physics Dept., Virginia State University, University of Saskatchewan, Canada, Chalk River Laboratories, Physics Dept, Oxford University, Physics Dept, Utah State University, Sandia National Laboratories, National Renewable Energy Laboratory, DOE Center for Integrated Nanotechnologies, Sandia National Laboratories, National Center for Atmospheric Research